Focused high- and low-energy ion milling for TEM specimen preparation
نویسندگان
چکیده
منابع مشابه
Improving High Resolution TEM Images using Low Energy Ion Milling
Ion beam milling has become a widespread specimen preparation technique for non-biological materials over the last two decades, particularly for cross-sectional and plan-view transmission electron microscope (TEM) specimens. The basic principle of ion milling involves bombarding a specimen with energetic ions or neutral atoms acclerated and formed into a tightly focused ion beam. Material is sp...
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 55 شماره
صفحات -
تاریخ انتشار 2015